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用Ｓｉ表面微机械加工技术制作了一种具有４００μｍ×８００μｍ薄多晶硅谐振器的振动微型陀螺仪。陀螺仪受静电力的作用进行横向驱动，并检测谐振器与衬底之间电容变化的输出信号。０．１帕压力下获得的多晶硅谐振器驱动模和检测模的机械Ｑ值分别为２８００和１６０００。介绍了调整驱动模和检测模谐振频率变化差的有效方法。试验器件的噪声等效速率为７°／ｓ。
A vibrating micro-gyroscope with a 400μm × 800μm thin poly-silicon resonator was fabricated by Si surface micromachining technology. The gyroscope is driven horizontally by the electrostatic force and detects the output signal of the change in capacitance between the resonator and the substrate. The mechanical Q values of the driving and detecting modes of the polycrystalline silicon resonator at 0.1 Pa pressure are 2800 and 16000, respectively. An effective method to adjust the difference between the driving mode and the detecting mode resonance frequency is introduced. The noise equivalent speed of the test device is 7 ° / s.