随着超光滑表面质量的不断提高 ,表面清洗已成为超光滑基片制造过程中的一项重要工序 ,并且成为影响产品合格率的关键因素。着重介绍激光清洗的特点及超光滑表面激光辅助清洗表面微细污染微粒的机理 ,并通过实验性验证 ,表明该方法在清除超光滑表面微细污染物方面效果很好 As the quality of ultra-smooth surfaces continues to improve, surface cleaning has become an important process in the manufacture of ultra-smooth substrates and has become a key factor affecting product yield. Emphatically introduces the characteristics of laser cleaning and the mechanism of ultra-smooth surface laser-assisted cleaning of finely-polluting particles on the surface, and through experimental verification, shows that the method is very effective in removing ultra-smooth surface micro-pollutants