随着自身功能地不断增大,集成电路迅速地渗透到了各个工业领域中,其应用范围也正在向四处扩张。为了适应市场上对集成电路的需要,各集成电路制造厂家便努力发展各种稳定与高效率的集成电路制造技术。由于电路器件日趋高集成度化和高速度化,从而使之变得越来越复杂。为了在制造时能严密地控制必要的因素,所以各种集成电路制造设备对一些技 As their function continues to increase, integrated circuits rapidly penetrate into various industrial fields, and their applications are also expanding around. In order to meet the market demand for integrated circuits, the integrated circuit manufacturers will strive to develop a variety of stable and efficient integrated circuit manufacturing technology. Due to the ever-increasing integration of circuit devices and high-speed, making it more and more complex. In order to be able to strictly control the necessary factors in the manufacture, so a variety of integrated circuit manufacturing equipment for some technology