论文部分内容阅读
通过对含氯氧化在线实验结果和工艺仿真结果进行对比,并进行仿真工艺校准,发现采用氯含量相同的仿真校准结果较之等物质量仿真校准结果与实际工艺实验结果相吻合。对氯含量相同氧化校准模型进行了不同温度、不同氧化方式的验证,仿真结果与在线实验结果相吻合,并利用该模型对CCD工艺制作中含氯氧化进行了仿真,仿真结果与CCD工艺制作测试数据相一致。
By comparing the on-line experimental results of chlorine-containing oxidation with the simulation results of the process, the calibration of the simulation process was carried out. It was found that the simulation calibration results with the same chlorine content were in good agreement with the actual process simulation results. The oxidation calibration model with the same chlorine content was verified by different temperature and different oxidation modes. The simulation results were in good agreement with the online experimental results. The model was used to simulate the chlorine oxidation in the CCD process. The simulation results were compared with the CCD process production test The data is consistent.