当你试图在一层集成电路图形上面与另一层图形对准时,那是会很容易偏离目标点的。倘若确定整个寄存器单元图形,你应首先检查每个阵列的所有尺寸。随着当今的掩模误差愈来愈小,集成度的增加,以及单元图形条宽的减少,测量工作几乎就难以进行了。因此,对于准确度和位置精密度来说,你必须依赖图形发生器和精缩照相机,对其整个生产过程作出努力。准确度与精密度的区别准确度是指绝对偏差,而精密度是指可重复性的变量。呈请实践一下弹靶:你发射的三发子弹,着落在12英寸靶面中心的外边,那就是不准确。要准确,是达不到的。但是,如果这些子弹,彼此处在一英寸范围内,那就是精密度。在光掩模制作中,精密度是图象重合的同义词,而且影响其因素不外乎掩模制作、接触复 When you try to align another layer of graphics on one layer of integrated circuit graphics, that can easily deviate from the target. If you determine the entire register cell pattern, you should first check all the dimensions of each array. With today's smaller and smaller mask errors, increased integration, and reduced cell pattern width, measurement is almost impossible. So, for accuracy and positional precision, you have to rely on graphic generators and refinishing cameras to work on their entire production process. The difference between accuracy and precision Accuracy refers to the absolute deviation, and precision refers to the variable repeatability. Petition to Practice Projectiles: The three rounds you fired, landing outside the center of a 12-inch target, are inaccurate. To be accurate, it is unattainable. However, if these bullets are within one inch of each other, that's precision. In photomask fabrication, precision is synonymous with image coincidence, and affects nothing more than mask making, contact complexing