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76年4月14日到24日德意志民主共和国电子、自动化和科学仪器展览会在上海展出。我们参观了叶那卡尔察尔公司展出的ANR_4型九头步进重复照相机和JUBPM50型投影光刻机,并进行了技术座谈。下面仅就这两台设备简介如下: 一、ANR4型九头步进重复照相机 (1)主要技术指标 工作台最大行程:60×60毫米; 步进重复精度:0.1微米; 累积误差:0.3微米; x、y运动方向的直线性≤0.5微米; x、y运动方向的垂直性±≤3吋; 曝光时间10～12微秒; 曝光时间内工作台移动距离:ΔS≤0.05微米;
April 14-24, 76 The exhibition of electronic, automated and scientific instruments in the German Democratic Republic was on display in Shanghai. We visited the ANR_4 type nine step repetitive camera and the JUBPM50 type projection lithography machine exhibited by Yehna Karzal company and held technical discussions. The following brief description of the two devices are as follows: 1. ANR4 type nine stepper repeat camera (1) The main technical specifications Maximum travel table: 60 × 60 mm; step repeatability: 0.1 microns; cumulative error: 0.3 microns; x, y linear motion of the direction of motion ≤ 0.5 microns; x, y perpendicular to the direction of movement ± ≤ 3 inches; exposure time 10-12 microseconds; Exposure time table movement distance: ΔS ≤ 0.05 microns;