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应用高能量单脉冲激光作用在锆钛酸铅 (PZT)压电薄膜上 ,研究脉冲激光的热冲击对PZT薄膜性能产生的影响。发现在激光未烧熔薄膜的能量密度下 ,经过激光作用后 ,PZT薄膜的铁电性能发生变化 :在外加电压为 6V时 ,剩余极化强度值Pr 从 32 6 99μC/cm2 变到 2 6 316 μC/cm2 ;矫顽电场保持为 38 396kV/cm不变 ;疲劳性能变稳定 ,在循环 1 75× 10 9次时 Pr 衰变率由 4 4 3%变为 34 7%。最后讨论分析了产生这种现象的微观机理。
The effect of pulse laser thermal shock on the properties of PZT thin films was studied by using high energy single pulse laser on PZT piezoelectric film. It was found that the ferroelectric properties of the PZT thin films changed with the laser energy at the energy density of the unsintered film: the remanent polarization Pr changed from 32 6 99μC / cm2 to 26 316 at an applied voltage of 6V μC / cm2. The coercive electric field remained unchanged at 38 396 kV / cm. The fatigue performance became stable. The Pr decay rate changed from 44 3% to 34 7% at 1 75 × 10 9 cycles. The final discussion analyzes the microscopic mechanism of this phenomenon.