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作为一种高精度的光学镜面测量方法,子孔径拼接干涉测量的精度指标十分重要,必须对其进行定量估计。提出将子孔径拼接干涉的结果与全口径测试结果进行对比实验,将全口径测试结果作为拼接测量结果的参考真值,讨论了拼接测量精度评价指标及其计算方法。全口径测试与子孔径拼接干涉测量的几何参量并不相同,提出将全口径测试结果与子孔径拼接结果进行最优匹配,其原理与子孔径拼接算法的原理相同。在最优匹配后计算拼接测量精度的评价指标,通过测量实验进行了验证,结果表明最优匹配后的误差指标比未经最优匹配的误差指标减小约48%,证明上述方法是一种定量估计子孔径拼接干涉测量精度的有效方法。
As a kind of high accuracy optical specular measurement method, the precision index of subaperture splicing interferometry is very important and must be quantitatively evaluated. The results of the experiments on subaperture splicing interference are compared with those of the full aperture test. The full aperture test is taken as the reference true value of the splicing measurement results. The evaluation index and calculation method of the splicing measurement accuracy are discussed. The geometrical parameters of full aperture test and subaperture spline interferometry are not the same. The optimal match between full aperture test result and subaperture splicing result is proposed. The principle is the same as subaperture splicing algorithm. After the optimal matching, the evaluation index for calculating the precision of the splicing measurement is verified by the measurement experiment. The results show that the error index after the optimal matching is reduced by 48% compared with the error index without the optimal matching, which proves that the above method is a An Effective Method for Quantitatively Estimating the Precision of Subaperture Stitching Interferometry.