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高速智能光纤通信系统和网络的飞速发展对光电探测器提出了更高要求。利用严格耦合波(RCWA)理论,给出了在亚波长光栅(SWG)下方具有分布布拉格反射镜(DBR)结构的理论分析模型,将这种结构作为反射镜应用于谐振腔增强型光探测器(RCE PD)的设计中。仿真表明由于SWG的引入,只需要4对λ/4厚度的InGaAsP/InP系DBR,可使整体膜系结构实现在中心波长1.55 μm处反射率达到99.7%,在1.40μm至1.62μm范围内反射率高于99%。引入SWG后的RCE PD在1.55μm附近的量子效率接近90%,串扰衰减系数与量子效率的乘积超过15 dB。有效地解决了InGaAsP/InP介质膜系DBR作为谐振腔反射镜反射率低、反射带宽窄的问题。
The rapid development of high-speed intelligent optical fiber communication systems and networks has set higher demands on the photodetectors. The theoretical analysis model with distributed Bragg reflector (DBR) structure under the subwavelength grating (SWG) is given by using the RCWA theory. The structure is used as a reflector in the cavity enhanced photodetector (RCE PD) in the design. The simulation results show that only 4 pairs of InGaAsP / InP DBRs with λ / 4 thickness are required due to the introduction of SWG. The overall film structure achieves a reflectivity of 99.7% at a central wavelength of 1.55 μm and a reflection in the range of 1.40 μm to 1.62 μm Rate above 99%. The quantum efficiency of RCE PD after SWG introduction is nearly 90% near 1.55μm, and the product of crosstalk attenuation coefficient and quantum efficiency exceeds 15 dB. It effectively solves the problem that the InGaAsP / InP dielectric film DBR has low reflectivity and narrow reflection bandwidth as a resonator mirror.