论文部分内容阅读
作者在前面的文章中报导了扭轮摩擦传动能实现亚纳米级的定位分辨率。然而,这套装置在结构上的复杂之处就是在于采用了静压轴承支撑扭轮。本文指出了扭轮摩擦传动在结构上如何可以简化为采用球轴承支撑扭轮。在简化之后,实验表明定位分辨率小于1纳米。本文得出结论,采用球轴承的扭轮摩擦传动对于在洁净环境下要求实现纳米级定位的制造过程变得更为方便,而且可以取代滚珠丝杠以及常规摩擦传动方式。
The author reported in the previous article that a torsion wheel friction drive achieves sub-nanometer positioning resolution. However, the structural complexity of the device is that hydrostatic bearings are used to support the torsion wheel. This paper points out how the torsion wheel friction drive can be simplified in structure to use a ball bearing to support the torsion wheel. After simplification, experiments show that the positioning resolution is less than 1 nanometer. This paper concludes that the use of torsional wheel friction drives with ball bearings has made it more convenient for manufacturing processes that require nanometer positioning in a clean environment and can replace ball screws and conventional friction drive.