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金刚石的成核和生长影响金刚石膜的质量。本文用自制的一种新型的不锈钢谐振腔型微波等离子CVD设备 ,等离子直径为 76mm ,均匀的温度分布使得金刚石膜均匀生长 ,在不同工艺条件下研究Si3N4 陶瓷刀具上金刚石涂层的成核质量 ,用SEM ,Raman检测和分析研究了在Si3N4 刀具上高速高质量生长金刚石膜涂层的制备工艺 ,并检测了涂层刀具的切削性能 ,切削试验表明 ,在切削18wt%Si Al合金时 ,金刚石涂层刀具比未涂层刀具的使用寿命增多 10倍以上。
Diamond nucleation and growth affect the quality of diamond films. In this paper, a new type of stainless steel resonator microwave plasma CVD equipment made by ourselves was used to make uniform growth of the diamond film with a plasma diameter of 76mm. The nucleation quality of the diamond coating on the Si3N4 ceramic tool was studied under different process conditions. The preparation technology of high-speed and high-quality growth diamond film coating on Si3N4 tool was studied by SEM and Raman, and the cutting performance of the coating tool was tested. The cutting test showed that when cutting 18wt% SiAl alloy, diamond coating Layer tool life than uncoated tool 10 times more.