The purpose of this paper is to investigate the hydrophobic and mechanical behavior of the fluoro-carbon film on the composite.Fluoro-carbon films were fabricated on C/C and C/SiC composite by microwave ECR chemical vapor deposition combined with plasma source ion implantation technology (PSII).The films were investigated in terms of the surface morphology,chemical composition,hydrophobic behavior and mechanical properties.The hydrophobic property was determined by means of contact angle measurements,chemical bond structure was analyzed by fourier-transform infrared spectrum,and critical loading were measured by micro-scratch.The results showed that the fluorine presented mainly in the forms of CF2 group and C=CFx (x=1,2) in the film,the addition of fluorine to the carbon film had a critical influence on the hydrophobicity.Atomic force microscopy (AFM) were used for investigating the effect of surface morphology and roughness on hydrophobicity,it showed that fluoro-carbon films with appropriate surface morphology and roughness could achieve excellent hydrophobicity. The purpose of this paper is to investigate the hydrophobic and mechanical behavior of the fluoro-carbon film on the composite. Fluoro-carbon films were fabricated on C / C and C / SiC composite by microwave ECR chemical vapor deposition combined with plasma source ion implantation technology (PSII). The films were investigated in terms of the surface morphology, chemical composition, hydrophobic behavior and mechanical properties. the hydrophobic property was determined by means of contact angle measurements, chemical bond structure was analyzed by fourier-transform infrared spectrum, and critical loading were measured by micro-scratch. The results showed that the fluorine presented mainly in the forms of CF2 group and C = CFx (x = 1,2) in the film, the addition of fluorine to the carbon film had a critical influence on the hydrophobicity. Atomic force microscopy (AFM) were used for investigating the effect of surface morphology and roughness on hydrophobicity, it showed that fluoro-carbon films with ap propriate surface morphology and roughness could achieve excellent hydrophobicity.