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本文通过在0℃、0.5mol·L-1的草酸溶液中阳极氧化高纯铝片的方法制得了阳极氧化铝(AAO)膜,并用扫描电子显微镜(SEM)和原子力显微镜(AFM)对AAO膜的形貌和结构进行了表征。结果表明,阻挡层AAO膜中大小一致的膜胞在铝/氧化铝界面上排成六方形阵列;有孔层AAO膜中含有高度有序的纳米孔阵列和膜胞阵列,并且孔的直径和膜胞的尺寸都具有较窄的分布。另外,考察了阳极氧化电压对膜胞尺寸、孔径大小、孔密度和膜胞密度的影响,表明在一定的电压范围内,膜胞和孔径都随电压的升高而增大,而孔密度和膜胞密度却随电压的升高而减小。
In this paper, anodized aluminum (AAO) films were prepared by anodizing high-purity aluminum flakes in 0.5 mol·L-1 oxalic acid solution at 0 ℃. The AAO films were characterized by scanning electron microscopy (SEM) and atomic force microscopy The morphology and structure were characterized. The results showed that the size-matched membrane cells in the AAO barrier layer were arranged in a hexagonal array at the aluminum / alumina interface. The porous AAO membrane contained highly ordered nanopore arrays and membrane-cell arrays, and the pore diameter and Membrane cell size has a narrower distribution. In addition, the effect of anodization voltage on membrane cell size, pore size, pore density and membrane cell density was investigated. It was found that the membrane cell and pore size increased with the increase of voltage in a certain voltage range, while the pore density and Membrane cell density decreases with increasing voltage.