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自锁型2×2和1×4光开关是在{100}硅基片上采用各向异性湿刻蚀工艺技术在KOH中制备的微机械光开关。这种制备方法可以低成本一次投料就能获得大量适合光纤对准、具有很高精度的微机械。本光开关包括两个硅热驱动器:一个驱动并联U形悬臂梁产生光纤侧向移动,另一个驱动夹持光纤用的H形扣子平台;通过薄的有弹性的硅臂把U形悬臂梁与刚性的能抗光纤角位移的平台连接起来。所制备的光开关具有产率高、机械稳定性好和优良的光学性能。采用标准单模光纤的光开关其串话小于-60dB。1×4和2×2光开关插入损耗分别为小于1 dB和近1 dB。在开关期间(<300 ms),2×2、1×4光开关所需驱动功率分别为<0.6 W和1.0 W。1×2光开关已做了寿命试验,无误工作循环大于106次,并且在室温下经一年多的工作,没有看到光学性能和开关行为的退化。
Self-locking 2 × 2 and 1 × 4 optical switches are micro-machined optical switches fabricated on {100} silicon substrates using anisotropic wet etching process technology in KOH. This method of preparation allows a large number of micromachines to be fiber-aligned and highly precise at a single feed at a low cost. The optical switch includes two silicon thermal drivers: one driving a parallel U-shaped cantilever to generate a lateral movement of the optical fiber and the other driving an H-shaped clamping platform for holding an optical fiber; and a U-shaped cantilever Rigid fiber-optic angular displacement of the platform connected. The prepared optical switch has high yield, good mechanical stability and excellent optical properties. Optical switches using standard single-mode optical fibers have a crosstalk of less than -60 dB. The 1 × 4 and 2 × 2 optical switch insertion losses are less than 1 dB and nearly 1 dB, respectively. The driving power required for 2 × 2 and 1 × 4 optical switches during switching (<300 ms) is <0.6 W and 1.0 W, respectively. 1 × 2 optical switches have been life-test, error-free work cycle is greater than 106 times, and at room temperature by more than a year of work, did not see the deterioration of optical performance and switching behavior.