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全光纤-谐振传感技术是80年代中期出现的一种新型传感技术。由于它兼有光纤、谐振传感技术和硅微结构的优点，因而被认为在航空、过程控制和医学等领域尤其具有重要的应用价值。硅微细加工工艺、光学激振和拾振是这一技术研制中的三个关键问题。本文将就方形硅膜片光学激振和拾振的原理进行探讨和分析。
All fiber - resonant sensing technology is a new sensing technology appeared in the mid-80s. Due to its combination of optical fiber, resonant sensing technology and the advantages of silicon microstructures, it is considered to be of particular value in aerospace, process control and medical applications. Silicon micromachining, optical excitation and pick-up are the three key issues in the development of this technology. This article will discuss and analyze the principle of optical excitation and pick-up of square silicon diaphragm.