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着重从实验角度对飞秒激光烧蚀金属薄膜所得直线微槽的形状尺寸与实验加工参数之间的控制规律进行了研究。对使用频率为1 kHz、波长为800 nm、脉宽为30 fs的超短脉冲激光在150 nm厚的金铬薄膜上直线扫描所得微结构进行观察,发现:改变聚焦物镜的数值孔径(NA)、激光功率、扫描速率以及重复扫描次数等实验参数,均会对加工所得微槽宽度造成影响。得到了减小聚焦物镜数值孔径、提高激光功率、降低激光扫描速率、增加扫描次数均能提高直线微槽的宽度的参数控制规律。此外,还对后向激光烧蚀方法进行了实验研究,并与前向刻蚀的实验结果进行比较,验证了前向加工方法在加工质量和加工效率方面均优于后向加工,并分析其原因。
The control law of the shape, size and experimental processing parameters of the linear microgrooves obtained by femtosecond laser ablation of metal thin films was studied emphatically from the experimental point of view. The results show that the numerical aperture (NA) of the focused objective lens can be reduced by scanning the obtained ultra-short pulse laser with a wavelength of 800 nm and a pulse width of 30 fs on a 150 nm thick chrome-chrome thin film. , Laser power, scan rate and the number of repeated scanning and other experimental parameters will affect the width of the resulting micro-groove. The parameter control law of decreasing the width of the linear microgroove by reducing the numerical aperture of the focusing objective, increasing the laser power, reducing the laser scanning rate and increasing the scanning times is obtained. In addition, the backward laser ablation method was also studied experimentally, and compared with the experimental results of forward etching, which verifies that the forward machining method is superior to the backward machining in processing quality and processing efficiency, and analyzes the reason.