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以W.Geiger提出的改进型振动轮式微机械陀螺仪为研究对象,分析了结构参数与其性能之间的内在联系.探讨了重力场及静电悬浮力对陀螺仪工作性能的影响,并以此为依据,提出音叉式驱动器叉指结构最佳间距的设计准则
W Geiger’s improved vibrating wheel MEMS gyroscope is the research object, and the inherent relationship between structure parameters and its performance is analyzed. The influence of gravity field and electrostatic levitation force on working performance of gyroscope is discussed, and based on this, the design criterion of optimum pitch of fork-typed driver interdigital structure