大型光学元件制造过程缓慢,制造能力往往受限于测量能力,纳米精度测量技术出现时,大型光镜测量精度一般受限于亚毫米级,采用激光雷达仪器测量光学表面粗糙度时,由于可在制造过程的任何阶段进行检查而不用移动抛光装置上的镜面,因而大大提高了测量的准确性。目前,激光雷达计量系统不仅可以测量工件的在 Large optical components manufacturing process is slow, the manufacturing capacity is often limited by the measurement capabilities, nano-precision measurement techniques appear, the general measurement accuracy of large light microscopy is generally limited to sub-millimeter level, the use of laser radar instrument to measure the optical surface roughness, Inspection at any stage of the manufacturing process without moving the mirror on the polishing device greatly improves the accuracy of the measurement. At present, the lidar measurement system can not only measure the workpiece in the