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本文介绍一种外差全息摄影图象干涉测量法,并说明应用这种方法可以在不接触目标物的情况下,测量目标的位移,形变和弯曲,其精度分别为3×10~(-10)m,0.2um/m和9×10~(15)/m。还简要地讨论了这种方法的典型应用。尤其在位移和形变分析中,发现外差全息摄影测量术具有特殊的用途。它特别适合于用等值线来确定目标的形状和大小。在热传递和流体力学的研究中,也可以应用这种方法。当今,对于不接触目标物而测量其结构、设计和加工过程而言,外差全息图干涉测量是最正确、精度最高的方法。
In this paper, a method of heterodyne holographic image interferometry is introduced, and the displacement, deformation and bending of the target can be measured without touching the object with the accuracy of 3 × 10 -10 ) m, 0.2 μm / m and 9 × 10 ~ (15) / m. A brief discussion of the typical application of this method is also provided. Especially in the displacement and deformation analysis, found that heterodyne holographic measurement has a special purpose. It is particularly suitable for contouring to determine the shape and size of a target. This method can also be applied in the study of heat transfer and fluid mechanics. Today, heterodyne hologram interferometry is the most accurate and accurate method for measuring structures, designs, and processes without touching the target.