论文部分内容阅读
对掩膜处理的模具钢进行喷淋微细蚀刻,观测表面微观结构,分析掩膜间隙尺寸、喷淋压力对侧蚀量的影响。实验表明,随着掩膜间隙尺寸的增大,侧蚀量增大,这是因为微结构凹坑内部蚀刻液的滞留和对O2阻碍作用,造成了不同部位蚀刻速率不同,发生侧蚀;喷淋压力增大也导致侧蚀量增加,因为较大压力下蚀刻液的侧向蚀除力大,侧向蚀除作用强,同时蚀刻液更新频率快,反应速率提高,侧蚀增大。在微细蚀刻加工中合理地选择掩膜间隙尺寸,控制加工时间和喷淋压力,可以较好地控制侧蚀,保证较高的加工尺寸精度。
The mask-treated mold steel was spray-etched to observe the microstructure of the surface, and the influence of the mask gap size and spray pressure on the side erosion amount was analyzed. Experiments show that as the mask gap size increases, the amount of side etching increases, which is due to the stagnation of the etching solution inside the microstructure pits and the impediment to O2, resulting in different parts of the etching rate is different, the occurrence of side etching; The increase of the shower pressure also leads to the increase of the side etching, because the etching force of the etching liquid under the larger pressure has a large lateral erosion force and a strong lateral erosion effect, and at the same time, the etching liquid is updated frequently, the reaction rate is increased and the side etching is increased. In the fine etching process to select a reasonable mask gap size, control the processing time and spray pressure, you can better control the side etching, to ensure high precision machining dimensions.