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化学机械抛光(CMP)过程中由于柔性弹性隔膜的存在使得各区之间压力相互耦合,导致多区压力控制变得复杂化。该文提出了一种基于工作点线性化方法的离线辨识+定量耦合度分析+定量解耦控制的方案。利用工作点线性化方法,离线获得多区压力系统的3输入3输出模型;通过相对增益矩阵方法定量分析出各区之间的耦合程度;采用前馈补偿解耦控制器实现各区压力之间的定量解耦控制。仿真以及实验结果表明:该方案在工程实践中能够实现各区压力的定量解耦控制,使得系统在相同控制算法下获得更快的响应速度以及更小的超调量。
The chemical mechanical polishing (CMP) process, due to the presence of a flexible elastic diaphragm so that the pressure between the various regions coupled to each other, resulting in multi-zone pressure control becomes complicated. In this paper, a scheme of offline identification + quantitative coupling analysis + quantitative decoupling control based on the working point linearization method is proposed. The 3-input-3-output model of multi-zone pressure system is obtained offline by using the working point linearization method. The relative degree of coupling matrix is used to quantitatively analyze the coupling degree of each zone. The feedforward compensation decoupling controller Decoupling control. The simulation and experimental results show that this scheme can realize the quantitative decoupling control of pressure in each area in engineering practice, which makes the system obtain faster response speed and smaller overshoot under the same control algorithm.