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采用扫描电镜、Ｘ射线衍射及喇曼光谱等手段研究了ＨＦＣＶＤ过程中热丝碳化对金刚石成核特性的影响。热丝经充分碳化后能发射出更多热电子，进而从反应气体中激发出更多原子Ｈ和ＣＨ３＋，使金刚石晶核的孕育期大为缩短，３ｍｉｎ内即可在未经表面预处理的Ｓｉ衬底上获得１０１０ｃｍ－２以上的高晶核密度。
The effects of hot wire carbonization on the nucleation characteristics of diamond during HFCVD were investigated by scanning electron microscopy, X-ray diffraction and Raman spectroscopy. Hot wire fully carbonated can emit more hot electrons, and then from the reaction gas to stimulate more atoms H and CH3 +, so that the diamond nuclei incubation period greatly shortened within 3min without surface pretreatment Si substrate to obtain a high nucleation density of 1010 cm-2 or more.