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一、引言用全息干涉法测定三维工件的形状变化的可能性,首先是由 Hildebrandt 和 Haines 在1966年以膜片的隆起为例证明了的。原来坚持要保持表面精细结构,测量范围约为0.5～5微米。这两位作者已经讨论了定量评定的可能性。
I. INTRODUCTION The possibility of determining the shape change of three-dimensional workpieces by holographic interferometry was first demonstrated by the case of Hildebrandt and Haines in 1966 with the swelling of the diaphragm. The original insisted on maintaining the fine structure of the surface, the measurement range of about 0.5 to 5 microns. Both authors have discussed the possibility of quantitative assessment.