在集成电路真实缺陷检测中 ,缺陷图像的滤波程度直接影响到后续处理的结果 .通过对若干幅实际集成电路真实缺陷图像的分析 ,提出一种基于数学形态学的集成电路真实缺陷图像滤波方法 ,该方法不仅能滤除非冗余物缺陷 ,而且能滤除冗余物缺陷内部噪声 ,得到纹理一致的冗余物缺陷 In the real defect detection of integrated circuits, the degree of filtering of the defective image has a direct impact on the result of subsequent processing.By analyzing the real defects of a few actual integrated circuits, a real defect image filtering method based on mathematical morphology is proposed, The method not only can filter out non-redundant defects, but also can filter out internal defects of the redundancy defects to obtain texture-consistent redundancy defects