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中国电子学会半导体与集成技术学会工艺设备学组第二届全国半导体专用设备学术会,于今年4月7日至12日在江苏省无锡市召开。这届年会是电子工业部第四十五研究所主办、国营742厂协办的。全国47个从事半导体工艺设备研制、生产、教学的所、厂和大专院校共84名代表出席了这届学术会。国家科委和中国电子学会半导体与集成技术学会工艺设备学组分别发来贺电和贺信表示祝贺。无锡市有关领导及国营742厂对会议的召开给予了有力地支持。学术会共收到论文57篇,特约报告2篇。其中5篇论文和两篇特约报告在大会作了交流。其余论文分别在相应的专业组进行了宣读和讨论。这些论文和报告介绍了半导体专用设备的许多最新研制成果;对专用设备研
China Institute of Electronics and Semiconductor Technology Institute of Process Equipment Group Second National Semiconductor Special Equipment Academic Conference, April 7 to April 12 this year, held in Wuxi City, Jiangsu Province. This annual meeting is sponsored by the 45th Research Institute of the Ministry of Electronics Industry and co-organized by State-owned 742 Factory. Forty-four representatives from 84 institutes engaged in the development, production and teaching of semiconductor process equipment attended the conference. National Science and Technology Commission and the Chinese Institute of Electronics and Semiconductor Technology Institute of Technology and Equipment Group sent a congratulation letter and congratulation. Relevant leaders of Wuxi City and State-owned 742 Factory gave strong support to the convening of the conference. The conference received a total of 57 papers, two special reports. Five papers and two special reports were exchanged in the General Assembly. The rest of the papers were read and discussed in the respective professional groups. These papers and reports introduce many of the latest developments in semiconductor-specific devices;