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中等精度的微机械角速率传感器(又称陀螺仪)具有成本低、可靠性高、体积小、重量轻等优点,在民用和军用领域有着广泛的应用前景,具有很强的前沿性,目前世界各国对此非常关注并投入了大量研制和开发费用.根据国际发展趋势和我国的需求,我们研制了静电驱动的振动轮式微机械陀螺仪.本文主要针对这种微机械陀螺仪的特性进行分析,从工作原理,动力学方程出发,推导出了此类陀螺的检测输入角速度灵敏度;开环、闭环传递函数;交流反馈控制提取同相分量和抑制正交分量的原理;以及闭环控制改善动态测量频带的方法.
Medium precision micro-mechanical angular rate sensor (also known as gyroscope) has the advantages of low cost, high reliability, small size, light weight, etc., has a wide range of applications in civil and military fields, has a strong cutting-edge, the current world All countries attach great importance to this and put a lot of research and development costs.According to the international development trend and the needs of our country, we developed the electrostatic-driven vibratory wheel MEMS gyroscope.This paper mainly analyzes the characteristics of this kind of MEMS gyroscope Based on the working principle and kinetic equation, the sensitivities of the gyroscope’s detection input angular velocity are derived. The open-loop and closed-loop transfer functions are derived. The principle of the AC feedback control for extracting the inphase components and suppressing the quadrature components. The closed-loop control improves the dynamic measurement band Methods.