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叙述了软X射线波段反射式多层膜起偏器和检偏器的设计原则和设计方法,计算了不同波段软X射线反射式多层膜起偏器和检偏器的性能,讨论了多层膜制作过程中,表界面误差(表面粗糙度和扩散)对起偏器和检偏器性能的影响,探讨了光谱分辨率对偏振元件测试过程的影响,这些设计、计算和分析为制作实用软X射线多层膜偏振光学元件提供了理论基础。
The design principle and design method of soft X-ray reflection multilayer polarizer and analyzer are described. The performance of soft X-ray reflective multi-layer film polarizer and analyzer in different wavebands is discussed. Effects of surface interface error (surface roughness and dispersion) on the polarizer and analyzer behavior during the production of the layer film were discussed. The influence of spectral resolution on the testing process of the polarizer element was discussed. These design, calculation and analysis Soft X-ray multilayer polarizer optics provide the theoretical basis.