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通过等离子体基离子注入(PBII)表面改性的方法,采用不同的负脉冲偏压对Ti6Al4V合金进行氮/氟离子注入,并研究了改性层的结构、硬度以及摩擦磨损性能等。利用原子力显微镜研究了改性前后的表面粗糙度变化,并用X光电子能谱分析了改性层表面结构和化学组成,还使用力学显微探针分析试样的硬度,并用球盘式摩擦磨损实验仪和扫描电镜表征了摩擦磨损性能并观察了磨痕形貌。测试结果表明:氮氟离子注入改性试样粗糙度降低,并形成了由Ti O2,Ti F3,Ti F4和Ti N等组成的改性层;改性试样的纳米硬度值较未处理基体提高;氮氟离子注入试样表现出更好的弹性回复行为;改性试样摩擦系数和磨损体积均较基体下降,磨痕形貌从粘着磨损为主转变为磨粒磨损,耐磨性改善;注氟偏压-20 k V的试样获得最理想的性能。
The Ti6Al4V alloy was infiltrated with nitrogen / fluorine by different negative pulse bias through the plasma-based ion implantation (PBII) surface modification, and the structure, hardness and friction and wear properties of the modified layer were studied. The changes of surface roughness before and after modification were studied by atomic force microscopy. The surface structure and chemical composition of the modified layer were analyzed by X-ray photoelectron spectroscopy. The hardness of the modified sample was also analyzed by mechanical micro-probe. Friction and wear properties were characterized by scanning electron microscopy and scanning electron microscopy. The results show that the roughness of the samples modified by nitrogen fluoride ions is decreased, and the modified layer composed of Ti O2, Ti F3, Ti F4 and Ti N is formed. The nano-hardness of the modified samples is higher than that of the untreated substrate ; The nitrogen fluoride ion-implanted samples showed better elastic recovery behavior; the friction coefficient and wear volume of the modified samples were lower than that of the matrix, and the wear scar morphology changed from adhesive wear to abrasive wear, and the wear resistance improved ; Fluorine-biased -20 kV samples get the best performance.