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用真空热迁移法，以高纯石墨作为加热元件，构成大面积均匀热板，并以纯铁为冷板，通过严格控制冷、热板的温度，形成稳定的热梯度场．采用高阻单晶硅作为探测器的基体材料，在硅片表面用激光来进行刻槽，在其表面上蒸铝后，置于热迁移场中进行热迁移．按照探测器的要求，蒸发钛－钯－银构成电极，经钝化处理后沉积适当厚度的Ａｌ层作为窗口，构成垂直多重结Ｘ射线探测器．探测器具有良好的光谱响应，对Ｘ射线有较高的灵敏度，适于较大的Ｘ射线剂量辐射测量和较宽的Ｘ射线强度变化的测量．
Vacuum heat transfer method to high-purity graphite as a heating element to form a large uniform hot plate, and pure iron as a cold plate, through the strict control of cold and hot plate temperature, the formation of a stable thermal gradient field. Using high-resistance single-crystal silicon as the detector substrate material, the surface of the silicon laser engraved groove on the surface after the aluminum, placed in the heat transfer field for heat transfer. According to the requirements of the detector, the electrode of titanium-palladium-silver is evaporated, and the aluminum layer with appropriate thickness is deposited as a window after passivation treatment to form a vertical multiple junction X-ray detector. The detector has a good spectral response, high sensitivity to X-rays, suitable for larger X-ray dose measurements and wider X-ray intensity measurements.