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综述了硅微机械陀螺仪温度补偿方法的研究现状。介绍了陀螺仪的基本原理,并分析了陀螺仪的温度特性。分别对温度控制、器件设计和算法补偿三种温度补偿方法进行了原理和结果分析,总结了各种方法的优势与不足。介绍了算法补偿中两种常用的温度误差模型构建方法,算法补偿既符合小体积、低成本的设计理念,又能有效提升陀螺仪的温度稳定性,但复杂的算法需要强大的内存支撑,系统的响应速度亦会受到影响,因此在算法的优化设计方面仍有巨大的研究潜力和空间。随着陀螺仪数字化进程的不断推进,温度误差模型构建的标准化方法以及优化的算法是未来进一步的发展方向。
The research status of temperature compensation method of silicon micromechanical gyroscope is reviewed. The basic principle of the gyroscope is introduced, and the temperature characteristics of the gyroscope are analyzed. The temperature compensation, device design and algorithm compensation are respectively analyzed for the principle and result of temperature compensation. The advantages and disadvantages of each method are summarized. This paper introduces two commonly used temperature error modeling methods in algorithm compensation. The proposed algorithm not only meets the design concept of small volume and low cost, but also can effectively improve the temperature stability of the gyroscope. However, complex algorithms require strong memory support. The system The response speed will be affected, so there is still huge research potential and space in the optimal design of the algorithm. As the digitalization of gyroscope progresses, the standardization method of temperature error model construction and the optimized algorithm are the further development directions in the future.