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本文研究了多层悬空氮化硼的面内热导率。我们通过机械剥离法得到多层氮化硼,并利用干法转移技术将其悬空于微桥器件上,进而进行热导率测量。在干法转移的过程中,我们使用二甲基硅氧烷(PDMS)作为氮化硼载体,这样可使得样品表面残留的有机物更少,样品质量更高。本工作测得四层悬空氮化硼的面内热导率在室温达到286 Wm~(-1)K~(-1),与已知块体氮化硼的热导率大小相当,但低于双层氮化硼样品的结果,从而在实验上证明了悬空氮化硼面内热导率具有厚度效应。
In this paper, the in-plane thermal conductivity of multilayered boron nitride has been studied. We obtained a multi-layer boron nitride by a mechanical stripping method and suspended it on a micro-bridge device using a dry-process transfer technique to measure the thermal conductivity. In the dry transfer process, we use dimethylsiloxane (PDMS) as a boron nitride carrier, which results in less residual organic material on the sample surface and higher sample quality. In this work, the in-plane thermal conductivity of four layers of suspended boron nitride measured at room temperature reaches 286 Wm -1 K -1, which is equivalent to the thermal conductivity of the known bulk boron nitride but lower than Double boron nitride sample results, which experimentally proved that the suspended boron nitride in-plane thermal conductivity has a thickness effect.