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对于阴极弧离子源,磁过滤器的磁场设计是提高其性能的关键技术之一。针对现有磁过滤器对大颗粒过滤不足之处,本文利用永磁体优化磁过滤器的磁场位形,并且增大磁过滤器出口面积等方法,对弯管磁过滤器进行结构和磁场优化设计。由模拟结果可知:此过滤器具有弯管过滤、Bilek偏压、较大的出口面积、出口平面磁场强度大小均匀分布等优点。
For the cathode arc ion source, the design of the magnetic field of the magnetic filter is one of the key technologies to improve its performance. In view of the shortcomings of the existing magnetic filters for large particle filtration, this paper uses the permanent magnet to optimize the magnetic field shape of the magnetic filter and increase the outlet area of the magnetic filter to optimize the structure and magnetic field of the curved magnetic filter . From the simulation results we can see: This filter has the advantages of elbow filter, Bilek bias, larger outlet area, uniform distribution of the magnetic field strength of the exit plane and so on.