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对1mmHg左右的低压气体施加一电场进行辉光放电,气体中的少量自由电子将沿电场方向被加速。在压力低,距离长的条件下,电子的运动趋向极高的速度,因而得到相当大的动能。此种高能电子与分子或原子碰撞时将会使之激发、离解或断裂,产生各种激发态分子、离子、自由基及电子,气体处于电离状态。其中正离子和电子所带电荷相等,表观上呈中性,因而通常称之为等离子体。一般辉光放电所得到的等离子体离子化度K=10~(-5)～10~(-6),电子密
An electric field is applied to the low pressure gas around 1 mmHg for glow discharge. A small amount of free electrons in the gas are accelerated in the direction of the electric field. Under conditions of low pressure and long distance, the movement of electrons tends to a very high speed, and therefore considerable kinetic energy is obtained. Such high-energy electrons collide with molecules or atoms will cause excitation, dissociation or fracture, resulting in a variety of excited state molecules, ions, free radicals and electrons, the gas is ionized state. Which positive ions and electrons with the same charge, apparently neutral, and therefore commonly referred to as plasma. General glow discharge plasma ionization degree obtained K = 10 ~ (-5) ~ 10 ~ (-6), electron density