采用532nm波长的纳秒脉冲激光对由直流磁控溅射法制备的Ti/FTO复合薄膜表面进行了辐照处理,研究了激光能量密度对薄膜的表面形貌、晶体结构、光学性能和电学性能的影响。结果表明,采用适当能量密度的激光对薄膜进行激光辐照处理,一方面可对薄膜表面起到退火作用,促进薄膜晶粒生长、消除部分晶体缺陷,另一方面还可促使Ti层氧化成TiO_2层,最终使薄膜的综合光电性能得到提升。 The surface of Ti / FTO composite films prepared by direct current magnetron sputtering was irradiated by nanosecond pulsed laser at 532 nm. The effects of laser fluence on the surface morphology, crystal structure, optical properties and electrical properties of the films were investigated. Impact. The results show that laser irradiation with thin films with suitable energy density can not only anneal the film surface but also promote the grain growth and eliminate some crystal defects. On the other hand, the Ti layer can be oxidized into TiO_2 Layer, the final composite film to enhance the optical properties.