【摘 要】
：
The novel material of photonic crystal makes it possible to control a photon, and the photonic integration will have breakthrough progress due to the applicatio
【机 构】
：
State Key Laboratory of Integrated Optoelectronics,Key Laboratory of Optical Physics
【基金项目】
：
国家高技术研究发展计划(863计划);国家自然科学基金
论文部分内容阅读
The novel material of photonic crystal makes it possible to control a photon, and the photonic integration will have breakthrough progress due to the application of photonic crystal. It is based on the photonic crystal device that the photonic crystal integration could be realized. Therefore, we should first investigate photonic crystal devices based on the active and the passive semiconductor materials,which may have great potential application in photonic integration. The most practical and important method to fabricate two-dimensional photonic crystal is the micro-manufacture method. In this paper,we summarize and evaluate the fabrication methods of two-dimensional photonic crystal in near-infrared region, including electron beam lithography, selection of mask, dry etching, and some works of ours. This will be beneficial to the study of the photonic crystal in China.
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