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通过IBAD技术制备了MoS2 +Ag(Cu)复合膜 ,并利用XPS和ESR考察了复合膜的氧化情况。发现在RH为 6 0 %的大气环境下 ,Cu的掺入加速了MoS2 的氧化 ,相反Ag的加入却使MoS2 的氧化受到抑制 ;XPS发现MoS2 +Cu复合膜中存在Mo6 + ,ESR却并没发现中间态Mo5+ ;而XPS没有检测到MoS2 +Ag膜中有Mo6 + ,ESR却发现Mo5+ 。这说明Mo5+ 受化学环境影响较大
The MoS2 + Ag (Cu) composite films were prepared by IBAD technique and the oxidation of the composite films was investigated by XPS and ESR. It was found that the incorporation of Cu accelerates the oxidation of MoS2 under the atmosphere of 60% RH, while the oxidation of MoS2 is inhibited by the addition of Ag. XPS reveals that there is Mo6 + in the MoS2 + Cu composite film but no ESR Found that the intermediate state Mo5 +; and XPS did not detect the MoS2 + Ag membrane Mo6 +, ESR found Mo5 +. This shows that Mo5 + is greatly affected by the chemical environment