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采用脉冲激光气相沉积(PLD)方法,在Si(100)晶面上制备了Co:BaTiO3纳米复合薄膜.采用X射线衍射(XRD)结合透射电镜(TEM)方法研究了两种厚度Co:BaTiO3纳米复合薄膜的晶体结构,当薄膜厚度约为30nm时,薄膜为单一择优取向;当薄膜厚度约为100nm时,薄膜呈多晶结构.原子力显微镜(AFM)分析表明,当膜厚为30nm时,薄膜呈现明显的方形晶粒.采用紫外光电子能谱(UPS)研究了Co的价态和Co:BaTiO3纳米复合薄膜的价带谱.研究表明:当Co浓度很高时其态密度(DOS)与晶体BaTiO3明显不同.此外,嵌埋纳米Co颗粒的BaTiO3薄膜的能带结构可用纳米颗粒的浓度来调制,从而也可对其光学和电学性质进行改性.
BaTiO3 nanocomposite films were prepared on Si (100) by pulsed laser vapor deposition (PLD) method. Two kinds of Co: BaTiO3 nanocomposite films were investigated by X-ray diffraction (XRD) and transmission electron microscopy (TEM) The crystal structure of the composite film shows a single preferred orientation when the film thickness is about 30 nm and the polycrystalline structure when the film thickness is about 100 nm. AFM analysis shows that when the film thickness is 30 nm, The crystal structure of Co: BaTiO3 nanocomposite films was investigated by UV photoelectron spectroscopy (UPS). The results show that when the concentration of Co is very high, In addition, the band structure of BaTiO3 films embedded with nano-Co particles can be modulated with the concentration of nano-particles so that their optical and electrical properties can also be modified.