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本文研究了连续化学气相沉积过程中Nb_3Sn的某些生长特点与其载流能力之间的关系,发现由于沉积条件在沉积室空间内的自然变化,造成Nb_3Sn沉积层从里到外在品质上的优劣之别。由此作者提出了一些改善连续化学气相沉积过程的看法与途径,以便在沉积区的更大范围内使生长的Nb_3Sn优质化。
In this paper, the relationship between some growth characteristics and current carrying capacity of Nb3Sn in continuous chemical vapor deposition was studied. It is found that the quality of Nb3Sn deposited layer is excellent from the inside to the outside due to the natural variation of the deposition conditions in the deposition chamber. Bad thing. Therefore, the authors put forward some ideas and ways to improve the continuous chemical vapor deposition process in order to improve the growth of Nb 3 Sn better in the deposition area.