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@在车间条件下操作时rrrrrrrrn近几年市场上出现的光栅干涉仪在测量精度方面常优于He-Ne激光干涉仪.它有一些特别的优点rrrrrrrrn如在变化的环境空气条件下好的稳定性及通过尺体材料的选择对各应用状况的热膨涨系数的匹配能力rrrrrrrrn导致这些系统在高精密测量中用途的增加.本文阐述了光栅干涉仪的工作原理和特点rrrrrrrrn以及在这一技术基础上已经实现的一些测量系统.
@ operating in the workshop conditions R r r r r r n grating interferometer appeared in the market in recent years in the measurement accuracy is often better than the He-Ne laser interferometer. It has some special advantages such as good stability under changing ambient air conditions and thermal expansion through the choice of gauge material for each application The matching ability of the rising coefficient leads to the increase of the use of these systems in high-precision measurement.This paper expounds the working principle and characteristics of the grating interferometer r r r r r r r r n and some measurement systems that have been implemented on the basis of this technology.