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采用多弧离子镀技术和Ti-Al合金靶及Zr单质靶的组合,在高速钢基体上制备了(Ti,Al,Zr)N多元N梯度硬质反应膜。分别用扫描电镜、X射线衍射仪观察测定(Ti,Al,Zr)N梯度膜膜层的表面、断面形貌、成分以及相结构,研究了(Ti,Al,Zr)N多元氮梯度硬质反应膜的组织结构和性能。结果表明,与TiN、(Ti,Al)N、(Ti,Zr)N及(Ti,Al,Zr)N等单层硬质膜相比,采用Ti-Al合金靶及单质Zr靶组合方式制备的(Ti,Al,Zr)N多元氮梯度硬质反应膜具有较高的硬度和膜/基附着力,硬度最高可达HV6000,膜/基附着力大于180 N。同时,膜层还具有良好的抗热震性能。
The (Ti, Al, Zr) N multiple N gradient hard reaction films were prepared on high speed steel substrate by multi-arc ion plating and combination of Ti-Al alloy target and Zr single target. The surface, cross-sectional morphology, composition and phase structure of (Ti, Al, Zr) N gradient films were observed by scanning electron microscopy and X-ray diffraction. Reactive membrane structure and properties. The results show that Ti-Al alloy target and elemental Zr target are prepared in combination with TiN, (Ti, Al) N, (Ti, Zr) N and (Ti, Al, Zr) (Ti, Al, Zr) N multiple nitrogen gradient hard reactive films with high hardness and film / base adhesion, hardness up to HV6000, film / base adhesion greater than 180 N. At the same time, the film also has good thermal shock resistance.