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期刊论文
电磁驱动大尺寸MEMS扫描镜的研究
电磁驱动大尺寸MEMS扫描镜的研究
来源 :黑龙江科技信息 | 被引量 : 0次 | 上传用户:lisong459
【摘 要】
:
本文通过对荣华二采区10
【作 者】
:
何嘉辉,周鹏,余晖俊,沈文江,司金海,HEJia-hui,ZHOUPeng,YUHui-jun,SHENWen-jiang,SIjin-hai
【出 处】
:
黑龙江科技信息
【发表日期】
:
2017年1期
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