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本文提出了一种对机械振动等环境干扰不敏感的高分辨率光学轮廓仪，应用Ｎｏｍａ－ｒｓｋｉ微分干涉显微成象原理和相移干涉技术，实现了对表面微观轮廓的高精度绝对测量。仪器不需要标准参考反射镜和机械扫描机构，并且对机械振动等外界干扰不敏感，在不采取隔振和恒温等环境控制措施的一般实验室环境中，达到了优于０．１ｎｍ的垂直分辨率和０．２ｎｍ的表面轮廓高度重复测量精度。
In this paper, a high-resolution optical profilometer, which is insensitive to environmental disturbances such as mechanical vibration, is proposed. Noma-rski differential interference microscopic imaging principle and phase-shift interference technique are used to achieve high-precision absolute measurement of the microscopic surface profile. The instrument does not need a standard reference mirror and mechanical scanning mechanism, and is not sensitive to external disturbances such as mechanical vibration. It achieves better than 0.1nm vertical resolution in a general laboratory environment without adopting environmental control measures such as vibration isolation and constant temperature The repeatability of the measurements and the height of the 0.2nm surface profile are highly accurate.