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外差激光干涉仪能够通过光波细分达到亚纳米分辨率,因而在科学研究和精密机械制造中得到了广泛应用。然而,由于光学系统中不可避免的缺陷,导致被测信号中出现一个附加的相位误差,使测到的相位移和被测长度不呈线性关系,成为现有激光干涉仪难以逾越的精度极限。为此,通过光学相位补偿理论的研究得出一种消除激光干涉仪非线性误差的方法,它可以应用在大部分科学实验和工业制造中的纳米长度测量中,而且不论是一阶或二阶误差都可以通过这个方法被消除。
Heterodyne laser interferometer sub-nanometer resolution can be reached by light waves, and thus in scientific research and precision machinery manufacturing has been widely used. However, due to the unavoidable defects in the optical system, an additional phase error occurs in the measured signal, so that the measured phase shift does not have a linear relationship with the measured length, making it an insurmountable precision limit of existing laser interferometers. Therefore, a method of eliminating the nonlinearity error of laser interferometer is obtained through the study of optical phase compensation theory, which can be applied in the measurement of nanometer length in most scientific experiments and industrial manufacture, and whether it is first order or second order Errors can be eliminated by this method.