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5. Synthesis and characterization of C₃N₄ hard films

Synthesis and characterization of C₃N₄ hard films

来源 :中国科学：数学英文版 | 被引量 : 0次 | 上传用户：guihaiyidao1

【摘 要】

：

C3N4 films have been synthesized on both Si and R substrates by microwave plasma chemical vapor deposition (MPCVD) method. X-ray spectra were calculated for sin

【作 者】

：

顾有松 张永平 常香荣 田中卓 陈难先 时东霞 张秀芳 袁磊 

【出 处】

：

中国科学：数学英文版

【发表日期】

：

2000年2期

【关键词】

：

β-C3N4 MPCVD FILM deposition. β-C3N4  MPCVD  film deposition. 

【基金项目】

：

This work was supported by the National Natural Science Foundation of China(Grant Nos.19392300,19674009),the State Kdy Laboratory of Advanced Materials at Beijing University of Science and Technolo an

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论文部分内容阅读

C3N4 films have been synthesized on both Si and R substrates by microwave plasma chemical vapor deposition (MPCVD) method. X-ray spectra were calculated for single phase α-C3N4 and p-C3N4 respectively. The experimental X-ray spectra of films deposited on

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