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利用高速摄影技术,对磁控电弧离子镀中阴极斑点大小、寿命及运动轨迹进行了观测,获得了阴极斑点电流密度、运动速度随磁场、电弧电流及背景气体压力改变而变化的关系曲线。
Using high-speed photography technique, the cathode spot size, life span and movement track in magnetron arc ion plating were observed. The relationship between the current density of cathode spot and the moving speed with the change of magnetic field, arc current and background gas pressure was obtained.