文中分析了离子敏感场效应晶体管在国内外的发展,在开展器件研究工作中所进行的基础理论研究、制造工艺、测试技术及应用中的新进展。对这种器件的优缺点、应用领域及潜在的需求作了分析,并讨论了今后ISFET发展过程中研究课题的主要动向。 主要内容有: (1)各种化学传感器件,其中的化学敏 This paper analyzes the development of ion-sensitive field-effect transistors at home and abroad, the basic theoretical research carried out in the device research work carried out, manufacturing technology, testing technology and application of new progress. The advantages and disadvantages of these devices, application areas and potential needs are analyzed, and the main trends of research topics in the development of ISFETs are discussed. The main contents are: (1) a variety of chemical sensing devices, including the chemical sensitivity