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采用电子回旋共振-化学气相沉积结合中频磁控溅射的真空镀膜技术,以99.99%Ti为靶材,乙炔为碳源制备了Ti/Ti-类金刚石(DLC)多层膜.利用X射线衍射仪、扫描电子显微镜、X射线光电子能谱仪对Ti/Ti-DLC多层膜进行了相结构、组织、成分及形态分析.采用显微硬度仪、摩擦磨损仪、表面粗糙度仪对Ti/Ti-DLC多层膜进行了力学性能考察.结果表明:Ti/Ti-DLC多层膜中主要含有TiC晶相;Ti层和Ti-DLC层中未出现柱状晶体生长模式,分层中均以岛状模式生长;当调制周期A≤50 nm时,分层结构变模糊;调制周期A对Ti/Ti-DLC多层膜的复合硬度、摩擦系数、表面形貌、表面粗糙度都有影响,当调制周期A较小时表现出纳米增硬效应,表面出现大颗粒,表面粗糙度和摩擦系数均变大.
Ti / Ti-DLC multilayer films were prepared by electron cyclotron resonance-chemical vapor deposition combined with medium-frequency magnetron sputtering with 99.99% Ti as target and acetylene as carbon source.Using X-ray diffraction Ti / Ti-DLC multilayers were characterized by X-ray photoelectron spectroscopy, scanning electron microscopy and X-ray photoelectron spectroscopy.The microstructure, composition, composition and morphology of Ti / Ti-DLC multilayers were investigated.The results show that the TiC / Ti-DLC multilayers mainly contain TiC phase, while there is no columnar growth mode in both Ti and Ti-DLC layers When the modulation period is A≤50 nm, the layered structure becomes fuzzy. Modulation period A affects the composite hardness, friction coefficient, surface morphology and surface roughness of Ti / Ti-DLC multilayers. When the modulation period A is small, it shows nano-hardening effect, large particles appear on the surface, and the surface roughness and friction coefficient become larger.