Amorphous carbon films were deposited on single-crystalline silicon and K9 glass by pulse laser ablation using different negative substrate bias. Scanning electron microscope (SEM) was used to observe morphology of the surface. Thickness and refractive index of the film deposited on K9 glass were measured by ellipsometry. Micro-hardness of films was measured relatively to single crystal silicon. All films deposited on silicon were analyzed by Raman spectra. All spectra were deconvoluted to three peaks. Line-width ratios varied similarly with bias voltage when the laser energy was kept invariant.