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设计并制作了一种聚合物2×2定向耦合型电光开关.针对溶胶-凝胶法合成的有机/无机杂化电光材料膜厚较薄的情况,采用一种加载条形波导结构,利用掺有环氧丙脂的聚甲基丙烯酸甲脂-甲基丙烯酸缩水甘油脂作为引导层,在电光薄膜上构成定向耦合器,通过紫外光刻、反应离子刻蚀、电晕极化等工艺,制备了聚合物定向耦合型电光开关,并采用共面波导行波电极以电推挽方式工作.经测试,其器件损耗约为16dB,开关电压9V.
A 2 × 2 directional coupler-type electro-optic switch was designed and fabricated.Aiming at the thin film thickness of organic / inorganic hybrid electro-optic material synthesized by sol-gel method, Epoxy-terminated polymethylmethacrylate-glycidyl methacrylate was used as the guide layer to form a directional coupler on the electro-optic film. The photoconductor was prepared by UV lithography, reactive ion etching and corona polarization The polymer directional coupler electro-optical switch and the coplanar waveguide traveling wave electrode are used to work in push-pull mode.It has been tested that the device loss is about 16dB and the switching voltage is 9V.