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以四氯化钛乙醇溶液为钛源,聚乙烯吡咯烷酮(PVP)为碳源,采用碳热还原氮化技术制备氮化钛薄膜。利用XRD、FE-SEM和UV-VIS-NIR研究了合成温度和保温时间对氮化钛薄膜显微结构和光学性能的影响。结果表明,当合成温度为1250℃时,薄膜物相仍为金红石型TiO_2和Ti_3O_5;合成温度为1300℃时,薄膜为单一氮化钛物相,氮化钛颗粒呈典型的三角锥型。保温时间为5 h时,薄膜中氮化钛晶体发育更明显,薄膜在近红外区域的反射率可达70%,但保温时间延长到7 h时,薄膜中物相转变为碳化钛,石英玻璃基体中还析出了方石英。
Titanium tetrachloride solution was used as titanium source and polyvinylpyrrolidone (PVP) as carbon source. Titanium nitride thin films were prepared by carbothermal reduction nitridation. The effects of synthesis temperature and holding time on the microstructure and optical properties of TiN films were investigated by XRD, FE-SEM and UV-VIS-NIR. The results show that when the synthesis temperature is 1250 ℃, the films are still rutile TiO_2 and Ti_3O_5. When the synthesis temperature is 1300 ℃, the film is a single TiN phase and the TiN particles have a typical triangular pyramid shape. When the holding time is 5 h, the crystal of titanium nitride in the film develops more obviously, and the reflectivity of the film in the near infrared region can reach 70%. However, when the holding time is extended to 7 h, the phase of the film is transformed into titanium carbide and quartz glass Cristobalite also precipitated in the matrix.